TD系列多测力测头采用行业通用接口设计，精度高、适配性好，可自动更换。
| 相关参数及技术指标 | ||
| 精度指标 | ||
| 参数 | 测头模块类型 | |
| DM2 | ±0.8μm | |
| 单向重复性（2δ） | 0.35μm | ±0.8μm |
| 2D（XY）测量误差 | ±0.8μm | ±0.8μm |
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