TD系列多测力测头采用行业通用接口设计，精度高、适配性好，可自动更换。
Product Overview
Specifications & Technical Indicators
参数类型
模块
测头模块类型DM2
单向重复性（2δ）(μm)
0.35
2D（XY）测量误差(μm)
±0.8
测头模块类型DM3
单向重复性（2δ）(μm)
0.5
2D（XY）测量误差(μm)
1.0
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